PVD and CVD Vacuum Furnaces

PVD and CVD Vacuum Furnaces

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Vacuum Furnaces for PVD and CVD Coating

PVD and CVD vacuum chambers are used to deposit coatings on tools. The equipment generates a high or ultra-high vacuum at a level of 10^-9 mbar to facilitate the sputtering of parts with metal, ceramic, and carbon substrates, such as titanium, nickel, and chromium. AMP systems enable the deposition of multilayer coatings—so-called hybrid coatings—providing unique mechanical properties for machined parts, such as drill bits, end mills, or sintered turning inserts, etc. The parts are positioned in special holders that ensure uniform exposure of the workpieces throughout the chamber.
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